leader of the reasearch group
Scopus Author ID: 7006927546
549 49 6244
ohlidal(at)sci.muni.cz
Office: pav. 06/01031
Kotlářská 267/2
611 37 Brno
Optics for Thin films and Solid Surfaces
Research group at the Department of Plasma Physics and Technology
The research group Optics of Thin Films and Solid Surfaces of the DPPT is part of the CEPLANT Centre. We focus on the optical properties of thin film and solid surface systems and the optical characterization of these systems. These include, for example, layers prepared by plasma chemical methods, magnetron sputtering, or vacuum sputtering.
We develop and formulate new dispersion and structure models, which are then used in optical characterization. The structural models include defects such as random interface roughness, layer inhomogeneity, thickness non-uniformity, intermediate layer transitions, and others. Our optical laboratory has spectrophotometers and ellipsometers covering a wide spectral range from the far infrared to the vacuum ultraviolet region.
Our team
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technician
549 49 3709
pfranta(at)mail.muni.cz
Equipment
Ellipsometry
Spectrophotometry
Horiba Jobin Yvon UVISEL
- spectral range: 0.6 - 6.5 eV
- angles of incidence: 55° - 90°
- X-Y mapping table
Perkin Elmer Lambda 1050+
- spectral range: 0.38-6.6 eV
- measuring of layered systems transmittance
- stage for reflection measurements (AOI = 6°)
- measuring of transmittance of fluids in cuvettes
- URA detector for reflectance measurements at different angles of incidence (8°-65°)
Woollam IR-VASE
- spectral range: 300 - 6500 cm-1
- angles of incidence: 25° - 90°
- reflection and transmission mode
Bruker Vertex 80v
- spectral range: 70 - 7000 cm-1
- sample holder for perpendicular incidence for transmittance measurements
- stage for reflection measurements (AOI = 7°)
- vacuum measurement
Horiba Jobin Yvon UVISEL2 VUV
- spectral range: 0.6 - 8.5 eV
- fix angle of incidence 70°
- vacuum measurement
- possibility of sample heating
Cooperation
Bundesanstalt für Materialforschung und -prüfung (BAM)
Berlin, Germany
Czech metrology institute
Brno, Czech Republic
Fraunhofer-Institut für Angewandte Optik und Feinmechanik
Jena, Germany
Faculty of Mechanical Engineering, Brno University of Technology
Brno, Czech Republic
Hilase Centre, Institute of Physics, Academy of Sciences of the Czech Republic
Dolní Břežany, Czech Republic
Friedrich-Schiller-Universität
Jena, Germany
Johannes Kepler Universität Linz
Linz, Austria
LENA Laboratory for Emerging Nanometrology, Technische Universität Braunschweig
Braunschweig, Germany
Meopta - optika, s.r.o.
Přerov, Czech Republic
Physikalisch-Technische Bundesanstalt
Braunschweig, Germany
TTS, s.r.o. - Thin film technological service
Praha, Czech Republic
Varroc Lighting Systems, s.r.o.
Nový Jičín, Czech Republic
Students and alumni
Offered final thesis topics
- Optical characterization of fluoride thin films
- Characterization of randomly rough surfaces using optical methods and atomic force microscopy
Active studies
Beáta Hroncová
Alumni
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2022
Characterization of optically active liquids (bachelor thesis, Beáta Hroncová)
Determination of the optical constants of thin substrates in the infrared region (diploma thesis, Jiří Večeře)
Optical properties of non-stoichioemetric silicon nitride thin films prepared by reactive magnetron sputtering (diploma thesis, Martin Málek)
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2021
Determination of the optical constants and structural parameters of DLC thin films with silicon and oxygen admixtures (bachelor thesis, Pavlína Kührová)
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2020
Determination of the width of a spectral line of spectrophotometers for various settings of spectral resolution (bachelor thesis, Jiří Večeře)
Determination of thicknesses and optical constants of non-uniform polymer thin films (bachelor thesis, Veronika Šklíbová)
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2019
Optical characterization of silicon nitride thin films (bachelor thesis, Martin Málek)
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2018
Determination of the optical constants and thicknesses of silicon nitride thin films (bachelor thesis, Diana Csontosová)
Optical characterization of WBC films (bachelor thesis, Lukáš Rychnovský)
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2013
Optical characterisation of non-uniform thin films (dissertation thesis, David Nečas)
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2010
Deposition of hydrocarbon thin films in plasma and study of their properties (dissertation thesis, Miroslav Valtr)
Publications
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A comparative study of sioxcyhz thin films deposited in trimethysilyl ACETATE/O2/Ar plasmas 11th International Conference on Nanomaterials - Research & Application (NANOCON 2019), year: 2020
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Antireflexní vrstva na substrátu ve specifikaci T>=99,8 %@ 248 nm a T>=98,5 % @ 213 nm. Year: 2020
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Deposition of organosilicon coatings from trimethylsilyl acetate and oxygen gases in capacitively coupled RF glow discharge Progress in Organic Coatings, year: 2020, volume: 149, edition: December 2020, DOI
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Determining shape of thickness non-uniformity using variable-angle spectroscopic ellipsometry Applied Surface Science, year: 2020, volume: 534, edition: December 2020, DOI
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Ellipsometric characterization of highly non-uniform thin films with the shape of thickness non-uniformity modeled by polynomials Optics Express, year: 2020, volume: 28, edition: 4, DOI
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Ellipsometric characterization of inhomogeneous thin films with complicated thickness non-uniformity: application to inhomogeneous polymer-like thin films Optics Express, year: 2020, volume: 28, edition: 24, DOI
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Optical quantities of a multilayer system with randomly rough boundaries and uniaxial anisotropic media calculated using the Rayleigh-Rice theory and Yeh matrix formalism Physica Scripta, year: 2020, volume: 95, edition: 9, DOI
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Spectroscopic ellipsometry of inhomogeneous thin films exhibiting thickness non-uniformity and transition layers Optics Express, year: 2020, volume: 28, edition: 1, DOI
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Symmetry of linear dielectric response tensors: Dispersion models fulfilling three fundamental conditions Journal of applied physics, year: 2020, volume: 127, edition: 22, DOI